%0 Journal Article %1 bienert2023general %A Bienert, Florian %A Graf, Thomas %A Abdou Ahmed, Marwan %D 2023 %I Optica %J Optics express %K %N 4 %P 5334-5346 %R 10.1364/OE.481887 %T General mathematical model for the period chirp in interference lithography %V 31

@article{bienert2023general, added-at = {2023-07-26T14:14:58.000+0200}, author = {Bienert, Florian and Graf, Thomas and Abdou Ahmed, Marwan}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2ab36a76db89bc1ab74c84718113cbfb7/unibiblio}, doi = {10.1364/OE.481887}, interhash = {9a3e04001920d37b1994c5ed9ba327b8}, intrahash = {ab36a76db89bc1ab74c84718113cbfb7}, issn = {1094-4087}, journal = {Optics express}, keywords = {}, language = {eng}, number = 4, pages = {5334-5346}, publisher = {Optica}, timestamp = {2023-07-26T14:14:58.000+0200}, title = {General mathematical model for the period chirp in interference lithography}, volume = 31, year = 2023 }