%0 Conference Paper %1 anton1990development %A Anton, J. %A Steger, U. %A Dominguez, C. %A Samitier, J. %A Sandmaier, Hermann %B Micromechanics Europe (MME), 2nd Workshop on Micromachining, Micromechanics and Microsystems, Berlin, Germany, 26 - 27 November 1990, Berlin (1990) %C Berlin %D 1990 %K %T Development and simulation of a silicon-based pressure sensor with digital output %X A silicon-based pressure sensor with digital output has been developed by combining a piezoresistive pressure transducer, a CMOS circuit and a chip containing thin-film poly silicon trimming resistors. Digitalization of the transducer's analogue output signal is achieved by connecting it as input to a double-CMOS-inverter cascade with a poly silicon trimming resistor connected to the first inverter's source. Adjustment of the cascade's detection threshold is performed by laser-trimming of this resistor. Four of these digitizing circuits with different threshold voltages were connected in parallel. Simulation of the developed sensor has been performed with SPICE after implementing a novel simulation technique for piezoresistors. These were modelled by separating the temperature and pressure dependences into independent factors and constructing an equivalent into a SPICE netlist.

@inproceedings{anton1990development, abstract = {A silicon-based pressure sensor with digital output has been developed by combining a piezoresistive pressure transducer, a CMOS circuit and a chip containing thin-film poly silicon trimming resistors. Digitalization of the transducer's analogue output signal is achieved by connecting it as input to a double-CMOS-inverter cascade with a poly silicon trimming resistor connected to the first inverter's source. Adjustment of the cascade's detection threshold is performed by laser-trimming of this resistor. Four of these digitizing circuits with different threshold voltages were connected in parallel. Simulation of the developed sensor has been performed with SPICE after implementing a novel simulation technique for piezoresistors. These were modelled by separating the temperature and pressure dependences into independent factors and constructing an equivalent into a SPICE netlist.}, added-at = {2023-09-01T10:43:02.000+0200}, address = {Berlin}, author = {Anton, J. and Steger, U. and Dominguez, C. and Samitier, J. and Sandmaier, Hermann}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2f7dffd010d398216f10cce21dd2825e9/unibiblio-4}, booktitle = {Micromechanics Europe (MME), 2nd Workshop on Micromachining, Micromechanics and Microsystems, Berlin, Germany, 26 - 27 November 1990, Berlin (1990)}, eventdate = {1990-11-26/1990-11-27}, eventtitle = {Micromechanics Europe (MME), 2nd Workshop on Micromachining, Micromechanics and Microsystems}, interhash = {85b7b97e15a2d9d5c3ce8d715eeee07e}, intrahash = {f7dffd010d398216f10cce21dd2825e9}, keywords = {}, language = {eng}, timestamp = {2023-09-01T08:43:02.000+0200}, title = {Development and simulation of a silicon-based pressure sensor with digital output}, venue = {Berlin}, year = 1990 }