Article,

Thermal flow sensor for liquids and gases based on combinations of two principles

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Sensors and Actuators. A, Physical, 73 (1/2): 7-13 (1999)
DOI: 10.1016/S0924-4247(98)00248-9

Abstract

A new type of a flow sensor is presented which is based on a thermal principle. The combination of two detecting methods results both in a considerable increase in measuring range (0.1 to 150 mm/s) and in a shorter reaction time of less than 2 ms. Furthermore, the sensor is relatively insensitive to pollution. Devices were manufactured and successfully tested for liquids and gases.

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