%0 Journal Article %1 folkmer1999improved %A Folkmer, B. %A Siber, A. %A Großse Bley, W. %A Sandmaier, Hermann %A Lang, W. %D 1999 %I Elsevier %J Sensors and Actuators. A, Physical %K %N 1 %P 190-192 %R 10.1016/S0924-4247(98)00336-7 %T Improved simulation for strongly coupled micro-electro-mechanical systems : resonant vacuum sensor optimization %V 74 %X This paper describes a new approach for simulation and optimization of micro-electro-mechanical systems (MEMS) with strongly physical coupled behaviour. By the use of commercial analysis tools only, without any specific add-ons, MEMS simulation can be carried out to the end of system optimization. The combination of general purpose finite-elements analysis with multi-physics system simulation is successfully demonstrated, here by the example of a resonant total pressure sensor system

@article{folkmer1999improved, abstract = {This paper describes a new approach for simulation and optimization of micro-electro-mechanical systems (MEMS) with strongly physical coupled behaviour. By the use of commercial analysis tools only, without any specific add-ons, MEMS simulation can be carried out to the end of system optimization. The combination of general purpose finite-elements analysis with multi-physics system simulation is successfully demonstrated, here by the example of a resonant total pressure sensor system}, added-at = {2023-09-01T10:41:50.000+0200}, author = {Folkmer, B. and Siber, A. and Großse Bley, W. and Sandmaier, Hermann and Lang, W.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/206ac4c5eb2764634ccc45ad49a246586/unibiblio-4}, doi = {10.1016/S0924-4247(98)00336-7}, interhash = {685046f6e3b111d3d37bb0268640046f}, intrahash = {06ac4c5eb2764634ccc45ad49a246586}, issn = {0924-4247}, journal = {Sensors and Actuators. A, Physical}, keywords = {}, language = {eng}, number = 1, pages = {190-192}, publisher = {Elsevier}, timestamp = {2023-09-01T08:41:50.000+0200}, title = {Improved simulation for strongly coupled micro-electro-mechanical systems : resonant vacuum sensor optimization}, volume = 74, year = 1999 }