%0 Conference Paper
%1 Lyda2010a
%A Lyda, W.
%A Burla, A.
%A Haist, T.
%A Zimmermann, J.
%A Osten, W.
%A Sawodny, O.
%B SPIE Conference on Optical Micro- and Nanometrology
%D 2010
%K Friction ISYS Measurement Nano
%R 10.1117/12.853819
%T Automated Multi-Scale Measurement System for MEMS-Characterization
@inproceedings{Lyda2010a,
added-at = {2017-11-28T18:08:48.000+0100},
author = {Lyda, W. and Burla, A. and Haist, T. and Zimmermann, J. and Osten, W. and Sawodny, O.},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2cb79168a27e1786257fe855559ace2a9/isyspub},
booktitle = {SPIE Conference on Optical Micro- and Nanometrology},
doi = {10.1117/12.853819},
file = {Lyda2010a_SPIE_Automated_Measurement_System.pdf:..\\pdfs\\Lyda2010a_SPIE_Automated_Measurement_System.pdf:PDF},
interhash = {aaa3353b78696fcbe8809b0a1f5de8b5},
intrahash = {cb79168a27e1786257fe855559ace2a9},
isys_group = {MFU, OptoMech},
keywords = {Friction ISYS Measurement Nano},
timestamp = {2017-11-28T17:08:48.000+0100},
title = {Automated Multi-Scale Measurement System for MEMS-Characterization},
year = 2010
}