%0 Conference Paper %1 Oehme_2018 %A Oehme, Michael %A Schwarz, D. %A Schulze, Jörg %A Clausen, Caterina J. %A Fischer, Inga A. %B Silicon Photonics: From Fundamental Research to Manufacturing %D 2018 %I SPIE %K iht j.schulze.iht journal professional_meetings %R 10.1117/12.2318011 %T SiGeSn material for integrated optical devices %U https://doi.org/10.1117/12.2318011

@inproceedings{Oehme_2018, added-at = {2018-11-19T18:28:24.000+0100}, author = {Oehme, Michael and Schwarz, D. and Schulze, Jörg and Clausen, Caterina J. and Fischer, Inga A.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/23c9c720aaa2a9fe040042ddab89fcdf6/ihtpublikation}, booktitle = {Silicon Photonics: From Fundamental Research to Manufacturing}, doi = {10.1117/12.2318011}, interhash = {1b7f6f0fa2d6e0b16e07205d01eb8dda}, intrahash = {3c9c720aaa2a9fe040042ddab89fcdf6}, keywords = {iht j.schulze.iht journal professional_meetings}, month = may, publisher = {SPIE}, timestamp = {2018-11-24T16:47:19.000+0100}, title = {SiGeSn material for integrated optical devices}, url = {https://doi.org/10.1117/12.2318011}, year = 2018 }