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Microscopic three-dimensional topometry with ferroelectric liquid-crystal-on-silicon displays

, , , and . Appl. Opt., 42 (10): 1773--1778 (April 2003)
DOI: 10.1364/AO.42.001773

Abstract

When three-dimensional measurements are conducted with fringe projection, the quality of the grating used for the generation of the fringes is important. It has a direct influence on the achievable depth resolution in a given measurement setup. In the past, Ronchi gratings or gratings written in nematic liquid-crystal displays or in digital micromirror devices have been used. We report on the application of a reflective ferroelectric liquid-crystal-on-silicon display as the fringe-generating element in a setup based on a stereo microscope. With this device the depth resolution of measurements by use of phase-shifting algorithms can be significantly improved compared with the application of a Ronchi grating or a nematic liquid-crystal display.

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