%0 Journal Article %1 krauter2019topography %A Krauter, Johann %A Stark, Jonas %A Osten, Wolfgang %D 2019 %I De Gruyter %J TM-Technisches Messen %K ito reviewed %N 6 %P 309-318 %R 10.1515/teme-2019-0018 %T Topography measurement on disguised microelectromechanical systems using short coherence interferometry %V 86

@article{krauter2019topography, added-at = {2021-01-20T09:08:45.000+0100}, affiliation = {Krauter, J (Reprint Author), Inst Tech Opt, Pfaffenwaldring 9, D-70569 Stuttgart, Germany. Krauter, Johann, Inst Tech Opt, Pfaffenwaldring 9, D-70569 Stuttgart, Germany. Stark, Jonas; Osten, Wolfgang, Univ Stuttgart, Inst Tech Opt, Stuttgart, Germany.}, author = {Krauter, Johann and Stark, Jonas and Osten, Wolfgang}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/29c7785c21030115e60c5cbb3ea5632e8/faulhaber}, doi = {10.1515/teme-2019-0018}, interhash = {0df24f1d6f7eb339a639ab0d71a0e54a}, intrahash = {9c7785c21030115e60c5cbb3ea5632e8}, issn = {{0171-8096} and {2196-7113}}, journal = {TM-Technisches Messen}, keywords = {ito reviewed}, language = {ger}, number = 6, pages = {309-318}, publisher = {De Gruyter}, research-areas = {Instruments & Instrumentation}, timestamp = {2021-01-20T08:08:45.000+0100}, title = {Topography measurement on disguised microelectromechanical systems using short coherence interferometry}, unique-id = {ISI:000471264800002}, volume = 86, year = 2019 }