Metrological features of diffractive high-efficiency objectives for laser interferometry
C. Pruss, S. Reichelt, H. Tiziani, and V. Korolkov. Proc. SPIE 4900, 7th International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, page 873--884. International Society for Optics and Photonics, SPIE, (2002)
DOI: 10.1117/12.484473
%0 Conference Paper
%1 pruss2002metrological
%A Pruss, Christof
%A Reichelt, Stephan
%A Tiziani, Hans J
%A Korolkov, Victor Pavlovich
%B Proc. SPIE 4900, 7th International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life
%D 2002
%I SPIE
%K ito s_reichelt
%P 873--884
%R 10.1117/12.484473
%T Metrological features of diffractive high-efficiency objectives for laser interferometry
@inproceedings{pruss2002metrological,
added-at = {2021-09-29T10:59:49.000+0200},
author = {Pruss, Christof and Reichelt, Stephan and Tiziani, Hans J and Korolkov, Victor Pavlovich},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/250530619b0f3775d4936ad33ea774672/faulhaber},
booktitle = {Proc. SPIE 4900, 7th International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life},
doi = {10.1117/12.484473},
interhash = {45b170ab8338138f1fa9d49bfe6fd800},
intrahash = {50530619b0f3775d4936ad33ea774672},
keywords = {ito s_reichelt},
organization = {International Society for Optics and Photonics},
pages = {873--884},
publisher = {{SPIE}},
timestamp = {2021-09-29T08:59:49.000+0200},
title = {Metrological features of diffractive high-efficiency objectives for laser interferometry},
year = 2002
}
