%0 Conference Paper
%1 inproceedings
%A Totzeck, Michael
%A Tavrov, Alexander
%A Kerwien, Norbert
%A J. Tiziani, Hans
%D 2002
%E SPIE, Proc.
%J Proceedings of SPIE - The International Society for Optical Engineering
%K ito reviewed
%R 10.1117/12.472233
%T Inspection of sub-wavelength structures and zero-order gratings using polarization interferometry
%V 4777
@inproceedings{inproceedings,
added-at = {2019-05-09T15:04:57.000+0200},
author = {Totzeck, Michael and Tavrov, Alexander and Kerwien, Norbert and J. Tiziani, Hans},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/239d01fd592b0fe26caf8d6099e92d952/vogelfrau},
doi = {10.1117/12.472233},
editor = {SPIE, Proc.},
interhash = {eaa45d9ff4e74826308c9a2367b4a908},
intrahash = {39d01fd592b0fe26caf8d6099e92d952},
journal = {Proceedings of SPIE - The International Society for Optical Engineering},
keywords = {ito reviewed},
month = {06},
timestamp = {2019-05-09T13:04:57.000+0200},
title = {Inspection of sub-wavelength structures and zero-order gratings using polarization interferometry},
volume = 4777,
year = 2002
}