%0 Journal Article %1 roeder2019fabrication %A Roeder, Marcel %A Thiele, Simon %A Hera, Daniel %A Pruss, Christof %A Guenther, Thomas %A Osten, Wolfgang %A Zimmermann, André %D 2019 %J Journal of Manufacturing Processes %K myown myownsend:unibiblio %P 402-409 %R https://doi.org/10.1016/j.jmapro.2019.10.012 %T Fabrication of curved diffractive optical elements by means of laser direct writing, electroplating, and injection compression molding %U https://www.sciencedirect.com/science/article/pii/S1526612518308077 %V 47 %X In this work, a new process chain for the fabrication of curved micro-structured optical elements by injection compression molding is investigated. The fabrication is demonstrated for the example of a curved diffractive optical element (DOE). In a first process step a master substrate is fabricated using laser direct writing on a curved glass substrate. Blazed diffractive micro-structures with lateral feature sizes down to 5 μm and height of 1.6 μm are created. A subsequent electroplating process is applied to create a nickel stamper to be used as a tool insert for the molding process. During electroplating, a 3 mm nickel layer is formed, transferring the diffractive structures from the master substrate into a solid mold insert. The nickel stamper shows an accurate reproduction of the micro-structures. The mold insert is integrated into an injection compression molding tool to replicate the optical elements. Results show that the blazed diffractive structures are replicated with a high quality. Tests of the components within a chromatic-confocal measurement setup confirm that they can potentially replace expensive conventional elements.

@article{roeder2019fabrication, abstract = {In this work, a new process chain for the fabrication of curved micro-structured optical elements by injection compression molding is investigated. The fabrication is demonstrated for the example of a curved diffractive optical element (DOE). In a first process step a master substrate is fabricated using laser direct writing on a curved glass substrate. Blazed diffractive micro-structures with lateral feature sizes down to 5 μm and height of 1.6 μm are created. A subsequent electroplating process is applied to create a nickel stamper to be used as a tool insert for the molding process. During electroplating, a 3 mm nickel layer is formed, transferring the diffractive structures from the master substrate into a solid mold insert. The nickel stamper shows an accurate reproduction of the micro-structures. The mold insert is integrated into an injection compression molding tool to replicate the optical elements. Results show that the blazed diffractive structures are replicated with a high quality. Tests of the components within a chromatic-confocal measurement setup confirm that they can potentially replace expensive conventional elements.}, added-at = {2022-06-02T09:47:37.000+0200}, author = {Roeder, Marcel and Thiele, Simon and Hera, Daniel and Pruss, Christof and Guenther, Thomas and Osten, Wolfgang and Zimmermann, André}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/239207184f5d4c56dca7a496f5e28f476/thomasguenther}, description = {Fabrication of curved diffractive optical elements by means of laser direct writing, electroplating, and injection compression molding - ScienceDirect}, doi = {https://doi.org/10.1016/j.jmapro.2019.10.012}, interhash = {bd2625a338edd4731689968831807832}, intrahash = {39207184f5d4c56dca7a496f5e28f476}, issn = {1526-6125}, journal = {Journal of Manufacturing Processes}, keywords = {myown myownsend:unibiblio}, pages = {402-409}, timestamp = {2022-06-02T07:47:37.000+0200}, title = {Fabrication of curved diffractive optical elements by means of laser direct writing, electroplating, and injection compression molding}, url = {https://www.sciencedirect.com/science/article/pii/S1526612518308077}, volume = 47, year = 2019 }