%0 Thesis %1 baier2016plasmauntersttzte %A Baier, Maximilian Paul %C Stuttgart %D 2016 %K diss oa phf04 ubs_10004 ubs_20005 ubs_30055 unibibliografie %R 10.18419/opus-8772 %T Plasmaunterstützte Gasphasenabscheidung (PE-CVD) von Multifunktionsschichten aus dem Precursorensystem Hexamethyldisiloxan/Sauerstoff

@phdthesis{baier2016plasmauntersttzte, added-at = {2022-12-06T11:28:25.000+0100}, address = {Stuttgart}, author = {Baier, Maximilian Paul}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/227acd3499428289e9be54a5dc6570bc1/unibiblio-3}, doi = {10.18419/opus-8772}, eventdate = {2015-06-22}, interhash = {6c3bca716b6fad058265911fd54a4fa0}, intrahash = {27acd3499428289e9be54a5dc6570bc1}, keywords = {diss oa phf04 ubs_10004 ubs_20005 ubs_30055 unibibliografie}, language = {ger}, school = {Universität Stuttgart}, supervisor = {Hirth, Thomas}, supervisorgnd = {140951725}, timestamp = {2022-12-06T10:28:25.000+0100}, title = {Plasmaunterstützte Gasphasenabscheidung (PE-CVD) von Multifunktionsschichten aus dem Precursorensystem Hexamethyldisiloxan/Sauerstoff}, type = {Dissertation}, year = 2016 }