%0 Conference Paper %1 watty-aohiimt2006 %A Watty, Robert %A Binz, Hansgeorg %B International Design Conference-Design 2006 %D 2006 %K 2006 IKTD KT Tagungsbeitrag %T Aspects Of High Integration in MEMS Technology

@inproceedings{watty-aohiimt2006, added-at = {2019-02-26T09:47:14.000+0100}, author = {Watty, Robert and Binz, Hansgeorg}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/29e92b0db4bd739022886a1b9cf723cfb/iktd_group}, booktitle = {International Design Conference-Design 2006}, eventtitle = {International Design Conference-Design 2006}, interhash = {f1f7eb85e37a78b692e8b8de48b1853c}, intrahash = {9e92b0db4bd739022886a1b9cf723cfb}, keywords = {2006 IKTD KT Tagungsbeitrag}, language = {english}, timestamp = {2019-10-01T12:26:07.000+0200}, title = {Aspects Of High Integration in MEMS Technology}, year = 2006 }