%0 Journal Article %1 oehme2021backside %A Oehme, Michael %A Kaschel, Mathias %A Epple, Steffen %A Wanitzek, Maurice %A Yu, Zili %A Schwarz, Daniel %A Köllner, Ann-Christin %A Burghartz, Joachim N. %A Schulze, Jörg %D 2021 %I IEEE %J IEEE sensors journal %K %N 17 %P 18696-18705 %R 10.1109/JSEN.2021.3091203 %T Backside Illuminated “Ge-on-Si” NIR Camera %V 21

@article{oehme2021backside, added-at = {2023-08-31T16:26:55.000+0200}, affiliation = {Oehme, M (Corresponding Author), Univ Stuttgart, Inst Semicond Engn, D-70569 Stuttgart, Germany. Oehme, Michael; Wanitzek, Maurice; Schwarz, Daniel; Schulze, Jorg, Univ Stuttgart, Inst Semicond Engn, D-70569 Stuttgart, Germany. Kaschel, Mathias; Epple, Steffen; Yu, Zili; Kollner, Ann-Christin; Burghartz, Joachim N., Inst Mikroelekt Stuttgart, D-70569 Stuttgart, Germany. Kollner, Ann-Christin; Burghartz, Joachim N., Univ Stuttgart, Inst Nano & Microelect Syst, D-70569 Stuttgart, Germany.}, author = {Oehme, Michael and Kaschel, Mathias and Epple, Steffen and Wanitzek, Maurice and Yu, Zili and Schwarz, Daniel and Köllner, Ann-Christin and Burghartz, Joachim N. and Schulze, Jörg}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/20458bf9367444d5182d20ff9b5a1d2f8/puma-wartung}, doi = {10.1109/JSEN.2021.3091203}, interhash = {18fc4804a017b049b56f96573a795a09}, intrahash = {0458bf9367444d5182d20ff9b5a1d2f8}, issn = {{1530-437X} and {1558-1748}}, journal = {IEEE sensors journal}, keywords = {}, language = {eng}, number = 17, pages = {18696-18705}, publisher = {IEEE}, research-areas = {Engineering; Instruments & Instrumentation; Physics}, timestamp = {2023-08-31T14:26:55.000+0200}, title = {Backside Illuminated “Ge-on-Si” NIR Camera}, unique-id = {WOS:000692613100046}, volume = 21, year = 2021 }