%0 Journal Article %1 article %A Körner, Klaus %A Ruprecht, Aiko %A Wiesendanger, Tobias %D 2004 %J Proceedings of SPIE - The International Society for Optical Engineering %K 3dm ito reviewed %R 10.1117/12.554754 %T New approaches in depth-scanning optical metrology %V 5457

@article{article, added-at = {2019-05-08T13:31:33.000+0200}, author = {Körner, Klaus and Ruprecht, Aiko and Wiesendanger, Tobias}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/26efea38e2de5e247c7372b9121f426cd/heidrunkempf}, doi = {10.1117/12.554754}, interhash = {096b0925c8acac52308e0abe179d8929}, intrahash = {6efea38e2de5e247c7372b9121f426cd}, journal = {Proceedings of SPIE - The International Society for Optical Engineering}, keywords = {3dm ito reviewed}, month = {09}, timestamp = {2019-05-08T11:31:33.000+0200}, title = {New approaches in depth-scanning optical metrology}, volume = 5457, year = 2004 }