%0 Journal Article %1 sandmaier1992compensation %A Sandmaier, Hermann %A Offereins, H. L. %A Kühl, Karl %A Plettner, A. %A Marusczyk, K. %D 1992 %I MYU %J Sensors and Materials %K %N 3 %P 127-144 %T Compensation Corner Undercutting of (100) Silicon in KOH %V 3

@article{sandmaier1992compensation, added-at = {2023-09-01T10:41:53.000+0200}, author = {Sandmaier, Hermann and Offereins, H. L. and Kühl, Karl and Plettner, A. and Marusczyk, K.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2a2a0788a2b3d147600ec2e06c3100f05/unibiblio-4}, interhash = {06035deb0ca40ca514cfae22c0b392a8}, intrahash = {a2a0788a2b3d147600ec2e06c3100f05}, issn = {0914-4935}, journal = {Sensors and Materials}, keywords = {}, language = {eng}, number = 3, pages = {127-144}, publisher = {MYU}, timestamp = {2023-09-01T08:41:53.000+0200}, title = {Compensation Corner Undercutting of (100) Silicon in KOH}, volume = 3, year = 1992 }