Abstract

Soft X-ray emission is a well-established phenomenon that occurs during laser material processing with ultrafast lasers at high irradiances. The emitted radiation spectrum provides details about the irradiance at the interaction zone of the laser beam and the processed material, making it a valuable beam diagnostic tool. However, quick measurements of the X-ray emission are necessary to make use of the spectral information. Unfortunately, these measurements are frequently hindered by energy pile-up because of the short emission times and high photon fluxes that occur during each laser pulse. A spectrometer was employed to measure the spectral X-ray emission produced by laser processing at irradiances of up to 1.6.1014 W/cm² and a de-piling algorithm was used to derive the underlying pile-up free spectrum. These spectra were obtained at various focal positions to determine the corresponding local irradiance and thereby analyze the focusing properties of the laser beam. Utilizing the spectral X-ray emission allows for the measurement of beam properties at the highest average power and pulse energy attainable with modern laser systems.

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