%0 Journal Article %1 Jasper.1999.Excimer %A Jasper, Knut %A Scheede, S. %A Burghardt, B. %A Senczuk, R. %A Berger, Peter %A Kahlert, H. J. %A Hügel, Helmut %D 1999 %J Applied Physics %K BeamPropagation Laser from:peterberger %N A 69 Suppl %P 319 %T Excimer laser beam homogenizer with low divergence

@article{Jasper.1999.Excimer, added-at = {2017-12-21T13:35:40.000+0100}, author = {Jasper, Knut and Scheede, S. and Burghardt, B. and Senczuk, R. and Berger, Peter and Kahlert, H. J. and Hügel, Helmut}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2819a606a704a576cf736d76388fc3c79/ifsw}, interhash = {bb0973498688b0f9ce7235bbf82553c0}, intrahash = {819a606a704a576cf736d76388fc3c79}, journal = {Applied Physics}, keywords = {BeamPropagation Laser from:peterberger}, number = {A 69 [Suppl]}, pages = 319, timestamp = {2017-12-21T12:35:40.000+0100}, title = {Excimer laser beam homogenizer with low divergence }, year = 1999 }